|
|
|
|
|
45 |
[E-beam lithography] beam current°ü·Ã |
À¯ÁöÇý |
21.03.24 |
1,899 |
|
44 |
Åõ°úÀüÀÚÇö¹Ì°æ ¾ÈÀüÀåºñ °ü·Ã ¹®ÀÇ |
ÇѽÂÇö |
20.04.10 |
1,876 |
|
43 |
µðÅØÅÍ °ü·Ã Áú¹® ÀÔ´Ï´Ù. |
±èÁø±Ô |
19.09.30 |
2,251 |
|
42 |
EBL system (JBX-9300FS) align °ü·Ã ¹®ÀÇ |
¹éÁö¹Î |
19.07.17 |
2,249 |
|
41 |
ECCI ÃÔ¿µ Á¶°Ç ¹®ÀÇ |
¾È¿ìÁø |
19.06.27 |
2,149 |
|
40 |
SEM holder ±¸¸Å ¹®ÀÇ °Ç |
ÀÌÁؼº |
19.03.22 |
2,290 |
|
39 |
JEOL SEM¿¡ Ÿ»ç EDS ¼³Ä¡ ¹®ÀÇ·Î ¿¬¶ôµå¸³´Ï´Ù |
±èÁ¤ÀÎ |
17.03.08 |
2,883 |
|
38 |
SPI ȸ»çÀÇ Á¦Ç° silver conductive paint ±¸ÀÔ ¹®ÀÇÇÕ´Ï´Ù. |
¿°Áö¿µ |
17.01.03 |
3,125 |
|
37 |
SEM Á¦Ç°¿¡ ´ëÇÑ ¹®ÀÇ |
ÀÌ»ó¹Î |
16.07.13 |
3,064 |
|
36 |
SEM °ßÀû ¿äû |
ÃÖ±¤¹® |
16.06.01 |
2,984 |
|
35 |
Normal SEM °ßÀû ¿äû |
ȫǥȯ |
16.04.26 |
2,936 |
|
34 |
SEM ¼ö¸® ¹× ºÎÇ° °ßÀû °ü·Ã ¹®ÀÇ |
Á¶¸í»ó |
16.03.30 |
3,018 |
|
33 |
E-beam lithography ¹®ÀÇ |
¾ÈÁöÈÆ |
16.03.10 |
3,349 |
|
32 |
SEM »ç¾ç¹®ÀÇ |
Á¤¼Ò¿µ |
16.02.29 |
2,709 |
|
31 |
oscillating arm (oxfordȍ) |
¹Î°æÀÎ |
16.02.17 |
2,541 |
|
30 |
sem holder ±¸¸Å °ü·Ã ¹®ÀÇ |
±è¹üÁØ |
16.02.11 |
3,319 |
|
29 |
SEM sample holder ¹®ÀÇ |
ÀÌÁö¿µ |
16.02.03 |
464,290 |
|
28 |
SEM°ü·Ã ¹®Àǵ帳´Ï´Ù. |
ÀåÆÇ¿µ |
16.02.02 |
2,997 |
|
27 |
SEM »ç¾ç ¹× °ßÀû ¹®ÀÇ |
Á¤°¡Èñ |
16.01.28 |
2,895 |
|
26 |
SEM ÁÖº¯±â±â°ü·Ã |
¿Àö¹Î |
16.01.20 |
2,694 |
|
|